Low turn-on voltage field emission triodes with selective growth of carbon nanotubes

K. J. Chen*, W. K. Hong, C. P. Lin, K. H. Chen, L. C. Chen, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

A low turn-on voltage, field emission triode array has been fabricated using the selective deposition of carbon nanotubes (CNTs) in a microwave plasma chemical vapor deposition (MPCVD) system. The field emission triodes exhibited a low turn-on voltage of 13 V and a large emission current of 23 μA with the gate voltage at 60 V. Short-term stress reveals a 10% current fluctuation within 1800 sec. The excellent electric properties suggest that the array shows potential for application in field emission displays and vacuum microelectronics.

Original languageEnglish
Pages (from-to)516-518
Number of pages3
JournalIEEE Electron Device Letters
Volume22
Issue number11
DOIs
StatePublished - 1 Nov 2001

Keywords

  • Carbon nanotubes
  • Field emission display
  • Field emission triode

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