Low temperature polycrystalline silicon thin film transistors fabricated by amorphous silicon spacer structure with pre-patterned TEOS oxide layer

Huang-Chung Cheng*, Chun Chien Tsai, Jian Hao Lu, Ting Kuo Chang, Ching Wei Lin, Bo Ting Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint Dive into the research topics of 'Low temperature polycrystalline silicon thin film transistors fabricated by amorphous silicon spacer structure with pre-patterned TEOS oxide layer'. Together they form a unique fingerprint.

Engineering & Materials Science