Low temperature polycrystalline silicon thin film transistors fabricated by amorphous silicon spacer structure with pre-patterned TEOS oxide layer

Huang-Chung Cheng^*, Chun Chien Tsai, Jian Hao Lu, Ting Kuo Chang, Ching Wei Lin, Bo Ting Chen

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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