Low-temperature poly-si thin-film transistor with a N2O-plasma ONO multilayer gate dielectric

Kow-Ming Chang*, Wen Chih Yang, Bing Fang Hung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint Dive into the research topics of 'Low-temperature poly-si thin-film transistor with a N<sub>2</sub>O-plasma ONO multilayer gate dielectric'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy