Low-temperature method for enhancing sputter-deposited Hf O2 films with complete oxidization

Chih Tsung Tsai, Ting Chang Chang*, Po-Tsun Liu, Po Yu Yang, Yu Chieh Kuo, Kon Tsu Kin, Pei Lin Chang, Fon Shan Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

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Physics & Astronomy