Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

Ching Jung Yang*, Shun Min Wang, Shih Wei Liang, Yung Huang Chang, Chih Chen, Jia Min Shieh

*Corresponding author for this work

Research output: Contribution to journalArticle

68 Scopus citations

Abstract

Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250°C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a bluegreen luminescence at 480 nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5 V μ m-1 and a threshold electric field of 9.8 V μ m-1, which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate.

Original languageEnglish
Article number033104
JournalApplied Physics Letters
Volume90
Issue number3
DOIs
StatePublished - 29 Jan 2007

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