Low-Temperature Activation and Recrystallization of B+- and BF+2-Implanted LPCVD Amorphous-Si Films

Huang-Chung Cheng, Fang Shing Wang, Yeong Fang Huang, Chun Yao Huang

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint Dive into the research topics of 'Low-Temperature Activation and Recrystallization of B+- and BF+2-Implanted LPCVD Amorphous-Si Films'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science