Low temperature a-SiGe:H Near-IR sensor and photovoltaic devices for flexible multi-functional panel: H near-IR sensor and photovoltaic devices for flexible multi-functional panel

Ming Hsuan Kao, Jia Min Shieh, Chang Hong Shen, Peichen Yu, Hao-Chung Kuo, Ching Ting Lee, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasmafabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140°C) a-SiGe:H films with low defect density (2.3×1016cm -3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
Subtitle of host publicationApplications and Technology, CLEO_AT 2013
PublisherIEEE Computer Society
ISBN (Print)9781557529725
DOIs
StatePublished - 1 Jan 2013
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: 9 Jun 201314 Jun 2013

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Conference

Conference2013 Conference on Lasers and Electro-Optics, CLEO 2013
CountryUnited States
CitySan Jose, CA
Period9/06/1314/06/13

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