This 60GHz voltage controlled oscillator (VCO) uses an on-chip resonator with embedded artificial dielectric in place of the LC tank. The advantages are reduced metal/substrate losses and higher resonator Q with 4.7 times reduction in length and 79 reduction in area. Occupying an active area of 0.015mm 2, this 90nm CMOS VCO consumes only 1.9mW. It shows very low phase noise of -107dBc/Hz at 1MHz frequency offset and an unprecedented F.O.M. of -200dBc/Hz, which outperforms III-V HBT and SiGe BiCMOS technologies.