Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs

Yongxi Qian; Mau-Chung Chang; Pingxi Ma; T. Itoh

doi:10.1109/SMIC.1998.750214

Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs

Yongxi Qian, Mau-Chung Chang, Pingxi Ma, T. Itoh

Department of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents a novel RF interconnect concept for high-density, broadband mixed signal silicon MMICs. Full-wave simulation results indicate that the newly proposed silicon/metal/polyimide (SIMPOL) interconnect has extremely low crosstalk (<-100 dB) from DC up to 50 GHz. Initial test with a simplified structure also reveals very low coupling levels which approach the background noise in measurement.

Original language	English
Title of host publication	1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998
Editors	Sammy Kayali
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	169-172
Number of pages	4
ISBN (Electronic)	0780352882, 9780780352889
DOIs	https://doi.org/10.1109/SMIC.1998.750214
State	Published - 1 Jan 1998
Event	1st Topical Meeting on Silicon Mono1ithic Integrated Circuits in RF Systems, SiRF 1998 - Ann Arbor, United States Duration: 18 Sep 1998 → 18 Sep 1998

Publication series

Name	1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998
Volume	1998-September

Conference

Conference	1st Topical Meeting on Silicon Mono1ithic Integrated Circuits in RF Systems, SiRF 1998
Country	United States
City	Ann Arbor
Period	18/09/98 → 18/09/98

Access to Document

10.1109/SMIC.1998.750214

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Qian, Y., Chang, M-C., Ma, P., & Itoh, T. (1998). Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. In S. Kayali (Ed.), 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998 (pp. 169-172). [750214] (1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998; Vol. 1998-September). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMIC.1998.750214

Qian, Yongxi ; Chang, Mau-Chung ; Ma, Pingxi ; Itoh, T. / Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998. editor / Sammy Kayali. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 169-172 (1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998).

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title = "Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs",

abstract = "This paper presents a novel RF interconnect concept for high-density, broadband mixed signal silicon MMICs. Full-wave simulation results indicate that the newly proposed silicon/metal/polyimide (SIMPOL) interconnect has extremely low crosstalk (<-100 dB) from DC up to 50 GHz. Initial test with a simplified structure also reveals very low coupling levels which approach the background noise in measurement.",

author = "Yongxi Qian and Mau-Chung Chang and Pingxi Ma and T. Itoh",

year = "1998",

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doi = "10.1109/SMIC.1998.750214",

language = "English",

series = "1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Qian, Y, Chang, M-C, Ma, P & Itoh, T 1998, Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. in S Kayali (ed.), 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998., 750214, 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998, vol. 1998-September, Institute of Electrical and Electronics Engineers Inc., pp. 169-172, 1st Topical Meeting on Silicon Mono1ithic Integrated Circuits in RF Systems, SiRF 1998, Ann Arbor, United States, 18/09/98. https://doi.org/10.1109/SMIC.1998.750214

Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. / Qian, Yongxi; Chang, Mau-Chung; Ma, Pingxi; Itoh, T.

1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998. ed. / Sammy Kayali. Institute of Electrical and Electronics Engineers Inc., 1998. p. 169-172 750214 (1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998; Vol. 1998-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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PY - 1998/1/1

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Qian Y, Chang M-C, Ma P, Itoh T. Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. In Kayali S, editor, 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998. Institute of Electrical and Electronics Engineers Inc. 1998. p. 169-172. 750214. (1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998). https://doi.org/10.1109/SMIC.1998.750214