Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs

Yongxi Qian, Mau-Chung Chang, Pingxi Ma, T. Itoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a novel RF interconnect concept for high-density, broadband mixed signal silicon MMICs. Full-wave simulation results indicate that the newly proposed silicon/metal/polyimide (SIMPOL) interconnect has extremely low crosstalk (<-100 dB) from DC up to 50 GHz. Initial test with a simplified structure also reveals very low coupling levels which approach the background noise in measurement.

Original languageEnglish
Title of host publication1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998
EditorsSammy Kayali
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages169-172
Number of pages4
ISBN (Electronic)0780352882, 9780780352889
DOIs
StatePublished - 1 Jan 1998
Event1st Topical Meeting on Silicon Mono1ithic Integrated Circuits in RF Systems, SiRF 1998 - Ann Arbor, United States
Duration: 18 Sep 199818 Sep 1998

Publication series

Name1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998
Volume1998-September

Conference

Conference1st Topical Meeting on Silicon Mono1ithic Integrated Circuits in RF Systems, SiRF 1998
CountryUnited States
CityAnn Arbor
Period18/09/9818/09/98

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    Qian, Y., Chang, M-C., Ma, P., & Itoh, T. (1998). Low-loss, low-crosstalk silicon/metal/polyimide (SIMPOL) interconnects for mixed signal silicon MMICs. In S. Kayali (Ed.), 1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998 (pp. 169-172). [750214] (1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998; Vol. 1998-September). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMIC.1998.750214