Low dielectric constant materials for interlayer dielectric applications: Materials science issues

Andrew J. McKerrow*, Chien Neng Liao, Huey Chiang Liou, Paul S. Ho, Leu-Jih Perng, Brian C. Auman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish
Pages (from-to)176-177
Number of pages2
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume37
Issue number1
StatePublished - 1 Mar 1996

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