Low dielectric constant materials for interlayer dielectric applications: Materials science issues

Andrew J. McKerrow^*, Chien Neng Liao, Huey Chiang Liou, Paul S. Ho, Leu-Jih Perng, Brian C. Auman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Original language	English
Pages (from-to)	176-177
Number of pages	2
Journal	American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume	37
Issue number	1
State	Published - 1 Mar 1996

Cite this

@article{025f7abc0ea9409c8486902274a7367a,

title = "Low dielectric constant materials for interlayer dielectric applications: Materials science issues",

author = "McKerrow, {Andrew J.} and Liao, {Chien Neng} and Liou, {Huey Chiang} and Ho, {Paul S.} and Leu-Jih Perng and Auman, {Brian C.}",

year = "1996",

month = mar,

day = "1",

language = "English",

volume = "37",

pages = "176--177",

journal = "American Chemical Society, Polymer Preprints, Division of Polymer Chemistry",

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Low dielectric constant materials for interlayer dielectric applications : Materials science issues. / McKerrow, Andrew J.; Liao, Chien Neng; Liou, Huey Chiang; Ho, Paul S.; Perng, Leu-Jih; Auman, Brian C.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Low dielectric constant materials for interlayer dielectric applications

T2 - Materials science issues

AU - McKerrow, Andrew J.

AU - Liao, Chien Neng

AU - Liou, Huey Chiang

AU - Ho, Paul S.

AU - Perng, Leu-Jih

AU - Auman, Brian C.

PY - 1996/3/1

Y1 - 1996/3/1

UR - http://www.scopus.com/inward/record.url?scp=3242873206&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:3242873206

VL - 37

SP - 176

EP - 177

JO - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

JF - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

SN - 0032-3934

IS - 1

ER -