A bottom anti-reflective coating (BARC) structure for ArF excimer laser lithography was demonstrated. The measured reflectance of lower than 1% on silicon substrates was achieved. By adding the BCB- and FLARE-based BARC layer, the swing effect was also significantly reduced.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 1 Nov 2001|