Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

Wei Xu, Bo Gao, Shenhui Ma, Anping Zhang, Yi Chiu, Yi Kuen Lee*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

20 Scopus citations

Abstract

In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C∼48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages189-192
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - 26 Feb 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period24/01/1628/01/16

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