Fingerprint Dive into the research topics of 'Location-controlled-grain Technique for Monolithic 3D BEOL FinFET Circuits'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Location-controlled-grain Technique for Monolithic 3D BEOL FinFET Circuits
Chih Chao Yang, Tung Ying Hsieh, Po-Tsang Huang, Kuan-Neng Chen, Wan Chi Wu, Shih Wei Chen, Chia He Chang, Chang Hong Shen, Jia Min Shieh, Chen-Ming Hu, Meng Chyi Wu, Wen Kuan Yeh
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review