Location-controlled-grain Technique for Monolithic 3D BEOL FinFET Circuits

Chih Chao Yang, Tung Ying Hsieh, Po-Tsang Huang, Kuan-Neng Chen, Wan Chi Wu, Shih Wei Chen, Chia He Chang, Chang Hong Shen, Jia Min Shieh, Chen-Ming Hu, Meng Chyi Wu, Wen Kuan Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science