Localized deformation and fracture behaviors in InP single crystals by indentation

Yi Jui Chiu, Sheng Rui Jian*, Ti Ju Liu, Phuoc Huu Le, Jenh-Yih Juang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The indentation-induced deformation mechanisms in InP(100) single crystals were investigated by using nanoindentation and cross-sectional transmission electron microscopy (XTEM) techniques. The results indicated that there were multiple "pop-in" events randomly distributed in the loading curves, which were conceived to arise primarily from the dislocation nucleation and propagation activities. An energetic estimation on the number of nanoindentation-induced dislocations associated with pop-in effects is discussed. Furthermore, the fracture patterns were performed by Vickers indentation. The fracture toughness and the fracture energy of InP(100) single crystals were calculated to be around 1.2 MPa·m1/2 and 14.1 J/m2, respectively.

Original languageEnglish
Article number611
JournalMicromachines
Volume9
Issue number12
DOIs
StatePublished - 22 Nov 2018

Keywords

  • Fracture toughness
  • InP(100) single crystal
  • Nanoindentation
  • Pop-in
  • Transmission electron microscopy

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