Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Jui Che Tsai*, Li Cheng Lu, Wei Chi Hsu, Chia-Wei Sun, Ming C. Wu

*Corresponding author for this work

Research output: Contribution to journalArticle

17 Scopus citations

Abstract

A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of 3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V.

Original languageEnglish
Article number015015
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number1
DOIs
StatePublished - 1 Jan 2008

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