The nanostructured silicates/fluorinated polyimide nanocomposite, containing only a few silicates, displays excellent water-absorption retardation behavior, which thus results in a lower leakage-current density and lower dielectric constants under higher humidity conditions than those of the pristine fluorinated polyimide. In addition, the thermal expansion of these nanocomposites is substantially lower than that of the fluorinated polyimide at elevated temperatures, and the tensile modulus of the nanocomposites is improved. Thus, these nanocomposites are quite suitable for being used as advanced dielectric materials in microelectronic applications.
|Number of pages||4|
|State||Published - 18 Mar 2002|