La2O3 gate dielectric thin film with Sc 2O3 buffer layer for high temperature annealing

Yasuhiro Shiino; Kuniyuki Kakushima; Parhat Ahmet; Kazuo Tsutsui; Nobuyuki Sugii; Takeo Hattori; Hiroshi Iwai

doi:10.1149/1.2355738

La₂O₃ gate dielectric thin film with Sc ₂O₃ buffer layer for high temperature annealing

Yasuhiro Shiino^*, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai

^*Corresponding author for this work

International College of Semiconductor Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

Leakage current characteristics of high temperature annealed La ₂O₃ film with Sc₂O₃ buffer layer was reported. Large amount of leakage current suppression was obtained by inserting Sc₂O₃ when annealed at high temperature, without degrading the Equivalent Oxide Thickness (EOT). La₂O ₃/Sc₂O₃ gate stack would be one of the solution for La₂O₃-based gate insulator for high temperature annealing. copyright The Electrochemical Society.

Original language	English
Pages (from-to)	511-519
Number of pages	9
Journal	ECS Transactions
Volume	3
Issue number	3
DOIs	https://doi.org/10.1149/1.2355738
State	Published - 2006
Event	Physics and Technology of High-k Gate Dielectrics 4 - 210th Electrochemical Society Meeting - Cancun, Mexico Duration: 29 Oct 2006 → 3 Nov 2006

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title = "La2O3 gate dielectric thin film with Sc 2O3 buffer layer for high temperature annealing",

abstract = "Leakage current characteristics of high temperature annealed La 2O3 film with Sc2O3 buffer layer was reported. Large amount of leakage current suppression was obtained by inserting Sc2O3 when annealed at high temperature, without degrading the Equivalent Oxide Thickness (EOT). La2O 3/Sc2O3 gate stack would be one of the solution for La2O3-based gate insulator for high temperature annealing. copyright The Electrochemical Society.",

author = "Yasuhiro Shiino and Kuniyuki Kakushima and Parhat Ahmet and Kazuo Tsutsui and Nobuyuki Sugii and Takeo Hattori and Hiroshi Iwai",

year = "2006",

doi = "10.1149/1.2355738",

language = "English",

volume = "3",

pages = "511--519",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "3",

note = "null ; Conference date: 29-10-2006 Through 03-11-2006",

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TY - JOUR

T1 - La2O3 gate dielectric thin film with Sc 2O3 buffer layer for high temperature annealing

AU - Shiino, Yasuhiro

AU - Kakushima, Kuniyuki

AU - Ahmet, Parhat

AU - Tsutsui, Kazuo

AU - Sugii, Nobuyuki

AU - Hattori, Takeo

AU - Iwai, Hiroshi

PY - 2006

Y1 - 2006

N2 - Leakage current characteristics of high temperature annealed La 2O3 film with Sc2O3 buffer layer was reported. Large amount of leakage current suppression was obtained by inserting Sc2O3 when annealed at high temperature, without degrading the Equivalent Oxide Thickness (EOT). La2O 3/Sc2O3 gate stack would be one of the solution for La2O3-based gate insulator for high temperature annealing. copyright The Electrochemical Society.

AB - Leakage current characteristics of high temperature annealed La 2O3 film with Sc2O3 buffer layer was reported. Large amount of leakage current suppression was obtained by inserting Sc2O3 when annealed at high temperature, without degrading the Equivalent Oxide Thickness (EOT). La2O 3/Sc2O3 gate stack would be one of the solution for La2O3-based gate insulator for high temperature annealing. copyright The Electrochemical Society.

UR - http://www.scopus.com/inward/record.url?scp=33846999035&partnerID=8YFLogxK

U2 - 10.1149/1.2355738

DO - 10.1149/1.2355738

M3 - Conference article

AN - SCOPUS:33846999035

VL - 3

SP - 511

EP - 519

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

IS - 3

Y2 - 29 October 2006 through 3 November 2006

ER -

La₂O₃ gate dielectric thin film with Sc ₂O₃ buffer layer for high temperature annealing

Abstract

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