La2O3 gate dielectric thin film with Sc 2O3 buffer layer for high temperature annealing

Yasuhiro Shiino*, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai

*Corresponding author for this work

Research output: Contribution to journalConference article

Abstract

Leakage current characteristics of high temperature annealed La 2O3 film with Sc2O3 buffer layer was reported. Large amount of leakage current suppression was obtained by inserting Sc2O3 when annealed at high temperature, without degrading the Equivalent Oxide Thickness (EOT). La2O 3/Sc2O3 gate stack would be one of the solution for La2O3-based gate insulator for high temperature annealing. copyright The Electrochemical Society.

Original languageEnglish
Pages (from-to)511-519
Number of pages9
JournalECS Transactions
Volume3
Issue number3
DOIs
StatePublished - 2006
EventPhysics and Technology of High-k Gate Dielectrics 4 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: 29 Oct 20063 Nov 2006

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    Shiino, Y., Kakushima, K., Ahmet, P., Tsutsui, K., Sugii, N., Hattori, T., & Iwai, H. (2006). La2O3 gate dielectric thin film with Sc 2O3 buffer layer for high temperature annealing. ECS Transactions, 3(3), 511-519. https://doi.org/10.1149/1.2355738