Lasing in a ZnO membrane microcavity with designable shape fabricated by focused ion beam milling

Tsu Chi Chang, Ying Yu Lai, Yu Hsun Chou, Tien-chang Lu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We show a three-dimensional membrane cavity fabrication technique and corresponding lasing characteristics of the fabricated rectangular ZnO membrane microcavity (MC) using optical injection. The ZnO membrane was cutfrom a single crystalline ZnO substrate by using a focused ion beam, and was then placed onto a SiO2 substrate by using a glass tip. The micro-photoluminescence measurement performed on the fabricated ZnO membrane MC at 77 K showed an obvious feature of lasing action including non-linear increasing of intensity and linewidth narrowing. By using this fabrication approach, various MCs with desired shapes can be made.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
DOIs
StatePublished - 23 Feb 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: 25 Oct 201528 Oct 2015

Publication series

NameMOC 2015 - Technical Digest of 20th Microoptics Conference

Conference

Conference20th Microoptics Conference, MOC 2015
CountryJapan
CityFukuoka
Period25/10/1528/10/15

Keywords

  • Fabrication
  • II-VI semiconductor materials
  • Lasers
  • Milling
  • Shape
  • Substrates
  • Zinc oxide

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