Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding

Cheng-Sheng Huang*, Wei Chih Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


This paper describes a novel fabrication technique for constructing a polymer-based large-core single-mode rib waveguide. A negative tone SU8 photoresist with a high optical transmission over a large wavelength range and stable mechanical properties was used as a waveguide material. A waveguide was constructed by using a polydimethylsiloxane stamp combined with a solvent-assisted microcontact molding technique. The effects on the final pattern's geometry of four different process conditions were investigated. Optical simulations were performed using beam propagation method software. Single-mode beam propagation was observed at the output of the simulated waveguide as well as the actual waveguide through the microscope image.

Original languageEnglish
Pages (from-to)4540-4547
Number of pages8
JournalApplied Optics
Issue number25
StatePublished - 1 Sep 2008

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