Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres

Yen Ming Chen, Yu Yen Lai, Yu Chiang Chao*, Hsiao-Wen Zan, Hsin-Fei Meng, Sheng Fu Horng, Che Hao Chang

*Corresponding author for this work

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

We demonstrated a large-area nanopatterning technique with the help of a non-close-packed PS sphere layer over a large-area substrate. The non-close-packed PS sphere layer is fabricated by blade coating method. It was demonstrated that non-close-packed PS spheres can be achieved within an area of 18 cm × 25 cm on a rigid glass substrate and within an area of 10 cm × 10 cm on a flexible substrate. We also demonstrated that the blade-coated non-close-packed PS sphere layer was suitable for the mass production of vertical organic transistors over a large area.

Original languageEnglish
Pages (from-to)18899-18903
Number of pages5
JournalACS Applied Materials and Interfaces
Volume7
Issue number34
DOIs
StatePublished - 17 Aug 2015

Keywords

  • large-area nanopattering
  • nanosphere lithography
  • organic transistors
  • polymer transistors
  • vertical transistors

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