Iridium oxide-based microelectrochemical transistors for pH sensing

K. Pásztor*, A. Sekiguchi, N. Shimo, N. Kitamura, Hiroshi Masuhara

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

52 Scopus citations


A study on electrochemically deposited iridium oxide films on Au wire and a pair of Au microelectrodes is reported. The open-circuit potential of the deposited film on an Au wire has been studied by a series of measurements. The pH sensitivity of the film is shown to be -64 to -66 mV/pH, while the relevant extrapolated potential at pH = 0 ranges from 0.67 to 0.71 V. Iridium oxide-based microelectrochemical transistors have also been fabricated. The resistance of the film on a pair of Au microelectrodes changes by 1.5 orders of magnitude from 300 to 8 MΩ as the gate voltage is stepped from -0.3 to 0.3 V. The response time of the device for chemical stimulation is less than 40 s and the device is demonstrated to be applicable as a pH sensor.

Original languageEnglish
Pages (from-to)225-230
Number of pages6
JournalSensors and Actuators: B. Chemical
Issue number3
StatePublished - 15 Apr 1993

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