In this paper, we reported a ferroelectric HfAlOx negative capacitor transistor with gate-stress (GS) engineering. Compared to control device, the HfAlOx transistor with GS engineering percentage of I-ON enhancement and 27% V-T reduction under the assistance of the negative capacitance (NC) effect. The orthorhombic phase transition played a crucial role in realizing the NC effect. From the results of the material analysis, the theoretical Landau simulation and electrical measurement, we demonstrated that the GS is favorable for inducing orthorhombic phase crystallization of HfAlOx and stabilizing the NC effect, which shows the potential for the application of advanced technology node.
- Ferroelectrics; gate stress (GS); negative capacitance (NC)