Investigation of characteristics of multi-function ZnO thin film deposited with various argon and oxygen ratios

Che Wei Hsu, Tsung Chieh Cheng, Chun Hui Yang, Yi Ling Shen, Jong-Shinn Wu*, Sheng Yao Wu, Wen Hsien Huang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The ZnO thin film was deposited on a glass substrate at RT by the RF reactive magnetron sputtering method. Structural, chemical, optical, and hydrophilic/hydrophobic properties are measured by using a surface profilometer, an x-ray diffractometry (XRD), an x-ray photoelectron spectroscopy (XPS), a UV-VIS spectrophotometer, and a contact angle system, respectively. Results show that the deposition rate decreases with increasing O 2 /(Ar+O 2 ) ratio. In additiion, the best stoichiometric and quality of ZnO thin film was observed at 0.30 of O 2 /(Ar+O 2 ) ratio, which shows the smallest FWHM and the strongest O-Zn strength. Regardless of O 2 /(Ar+O 2 ) ratio effect or thickness effect, high transmittance (> 86%) in the visible region is observed, while the UV-shielding characteristics depend upon both the magnitude of film thickness. The film thickness plays a more prominent role in controlling optical properties, especially in the UV-shielding characteristics, than the O 2 /(Ar+O 2 ) ratio. However, the hydrophobic characteristics can be obtained when the glass coating with ZnO thin films. In general, with properly coated ZnO thin film, we can obtain a glass substrate which is highly transparent in the visible region, has good UV-shielding characteristics, and possesses highly hydrophobic characteristics (self-clean capability), which is highly suitable for applications in the glass industries.

Original languageEnglish
Title of host publicationFunctional Metal-Oxide Nanostructures
Pages69-74
Number of pages6
DOIs
StatePublished - 31 Dec 2009
Event2009 MRS Spring Meeting: Functional Metal-Oxide Nanostructures - San Francisco, CA, United States
Duration: 14 Apr 200917 Apr 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1174
ISSN (Print)0272-9172

Conference

Conference2009 MRS Spring Meeting: Functional Metal-Oxide Nanostructures
CountryUnited States
CitySan Francisco, CA
Period14/04/0917/04/09

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    Hsu, C. W., Cheng, T. C., Yang, C. H., Shen, Y. L., Wu, J-S., Wu, S. Y., & Huang, W. H. (2009). Investigation of characteristics of multi-function ZnO thin film deposited with various argon and oxygen ratios. In Functional Metal-Oxide Nanostructures (pp. 69-74). (Materials Research Society Symposium Proceedings; Vol. 1174). https://doi.org/10.1557/PROC-1174-V09-05