Investigation of acoustic properties and Raman scattering of AlN films for biosensor application

Chung Jen Chung*, Po Tsung Hsieh, Jen Fin Lin, Ching Liang Wei, Wei Tsai Chang, Cheng Ting Chen, Ying Chung Chen, Chien Chuan Cheng, Cheng Hsiang Lin, Kuo Chih Chiu, Shean-Jen Chen, Kuo Sheng Kao

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this study, two approach of the molecular-level detection technique, acoustic-based and Raman-scattering-based detection, are adopted. The acoustic resonant signals are sensitive to the loading mass, such as nano particles and bio-molecules, while Raman scattering signals are highly surface sensitive to a wide range of adsorbate molecules. Aluminum nitride (AlN) thin film dominars both of the techniques. In the acoustic device, AlN acts as a piezoelectric layer to excite acoustic wave. In the Raman scattering experiment, the surface morphology of AlN give rise to a surface enhanced Raman signal. Thus, thin film bulk acoustic wave (TFBAW) properties as well as the surface enhanced Raman spectroscopy (SERS) signals of AlN are investigated. To obtain good piezoelectricity, a highly c-axis orientated AlN thin film is prepared by a reactive RF magnetron sputtering system. The c-axis orientated AlN possesses a pebble-like morphology, which is suitable for the SERS. Solidly-mounted resonators (SMR) are adopted to excite high frequency resonant signal, and the 1.5 GHz shear resonance signal is obtained. In the SERS measurement, the aqueous solution of Rhodamine 6G with concentration of 10-6 M added with 10 mM of sodium chloride was utilized to calibrate the enhancement factors.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages618-621
Number of pages4
DOIs
StatePublished - 4 Oct 2011
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 20 Feb 201123 Feb 2011

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period20/02/1123/02/11

Keywords

  • acoustic wave
  • aluminum nitride
  • SERS
  • solidly mounted resonator

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