The kinetics of the reduction of SiO//2 in Au/SiO//2/Si structures has been studied as a function of time, temperature, and annealing environment. Reduction of the oxide seems to be dependent on the presence of Au-Si eutectic as regions free of Au remained intact and samples of Au on bulk glass showed no reactions. The rate of reduction of the oxide proceeds with an activation energy of approximately 26 kcal/mole.
|Number of pages||3|
|State||Published - 1 Jan 1975|
|Event||22nd Natl Symp on Am Vac Soc - Philadelphia, PA, USA|
Duration: 28 Oct 1975 → 31 Oct 1975
|Conference||22nd Natl Symp on Am Vac Soc|
|City||Philadelphia, PA, USA|
|Period||28/10/75 → 31/10/75|