Abstract
Dominant drain leakage current mechanisms related to hot carrier stress generated interface traps are characterized in various n-MOSFET structures. Our study reveals that the lateral field induced band-trap-band tunneling is primarily responsible for an increased drain leakage current after hot carrier stress in an LDD MOSFET while the vertical field enhanced tunneling is a dominant leakage mechanism in a S/D conventional MOSFET structure.
Original language | English |
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Pages | 291-294 |
Number of pages | 4 |
State | Published - 1 Dec 1995 |
Event | Proceedings of the 1995 International Symposium on VLSI Technology, Systems, and Applications - Taipei, Taiwan Duration: 31 May 1995 → 2 Jun 1995 |
Conference
Conference | Proceedings of the 1995 International Symposium on VLSI Technology, Systems, and Applications |
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City | Taipei, Taiwan |
Period | 31/05/95 → 2/06/95 |