Abstract
An interface trap assisted tunneling mechanism which includes hole tunneling from interface traps to the valence band and electron tunneling from interface traps to the conduction band is presented to model the drain leakage current in a 0.5 µm LATID N-MOSFET. In experiment, the interface traps were generated by hot carrier stress. The increased drain leakage current due to the band-trap-band tunneling can be adequately described by an analytical expression of Aid = Aexp(—Bit / F) with a value of Bitof 13 MV/cm, which is much lower than that (36 MV/cm) of direct band-to-band tunneling.
Original language | English |
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Pages (from-to) | 2475-2477 |
Number of pages | 3 |
Journal | IEEE Transactions on Electron Devices |
Volume | 41 |
Issue number | 12 |
DOIs | |
State | Published - 1 Jan 1994 |