Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems

Yi Chiu*, Chung Wei Wu, Zhi Wei Zhuang, Jin-Chern Chiou, Han Ping D. Shieh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages140-141
Number of pages2
DOIs
StatePublished - 1 Dec 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 21 Aug 200624 Aug 2006

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period21/08/0624/08/06

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