Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems

Yi Chiu; Chung Wei Wu; Zhi Wei Zhuang; Jin-Chern Chiou; Han Ping D. Shieh

doi:10.1109/OMEMS.2006.1708304

Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems

Yi Chiu^*, Chung Wei Wu, Zhi Wei Zhuang, Jin-Chern Chiou, Han Ping D. Shieh

^*Corresponding author for this work

National Chiao Tung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages	140-141
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2006.1708304
State	Published - 1 Dec 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 21 Aug 2006 → 24 Aug 2006

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country	United States
City	Big Sky, MT
Period	21/08/06 → 24/08/06

Access to Document

10.1109/OMEMS.2006.1708304

Cite this

Chiu, Y., Wu, C. W., Zhuang, Z. W., Chiou, J-C., & Shieh, H. P. D. (2006). Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 140-141). [1708304] (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). https://doi.org/10.1109/OMEMS.2006.1708304

Chiu, Yi ; Wu, Chung Wei ; Zhuang, Zhi Wei ; Chiou, Jin-Chern ; Shieh, Han Ping D. / Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. pp. 140-141 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

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title = "Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems",

author = "Yi Chiu and Wu, {Chung Wei} and Zhuang, {Zhi Wei} and Jin-Chern Chiou and Shieh, {Han Ping D.}",

year = "2006",

month = dec,

day = "1",

doi = "10.1109/OMEMS.2006.1708304",

language = "English",

isbn = "078039562X",

series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

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booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

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Chiu, Y, Wu, CW, Zhuang, ZW, Chiou, J-C & Shieh, HPD 2006, Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708304, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, pp. 140-141, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 21/08/06. https://doi.org/10.1109/OMEMS.2006.1708304

Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems. / Chiu, Yi; Wu, Chung Wei; Zhuang, Zhi Wei; Chiou, Jin-Chern; Shieh, Han Ping D.

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 140-141 1708304 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Wu, Chung Wei

AU - Zhuang, Zhi Wei

AU - Chiou, Jin-Chern

AU - Shieh, Han Ping D.

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M3 - Conference contribution

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T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

SP - 140

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BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

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Chiu Y, Wu CW, Zhuang ZW, Chiou J-C, Shieh HPD. Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 140-141. 1708304. (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). https://doi.org/10.1109/OMEMS.2006.1708304