Integration of 2.4GHz RF transmitter with accelerometer for mobile sensing applications on 1P6M ASIC compatible CMOS MEMS process

Pao Min Chu, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A novel design to combine RF transmitter as well as sensor monolithically has been proposed. A 2.4GHz RF transmitter is integrated with a single axis accelerometer. The two port spiral transformer of which the secondary inductor is designed to be suspended with MEMS structure. The mutual inductance of the transformer will be changed due to displacement of the proof mass. The magnetic flux variation can be sensed by demodulation signal and the measured sensitivity is 11.8 Hz/g.

Original languageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages33-36
Number of pages4
ISBN (Electronic)9781538652831
DOIs
StatePublished - 3 Oct 2018
Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
Duration: 15 Aug 201817 Aug 2018

Publication series

NameIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Volume2018-August

Conference

Conference13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
CountryMalaysia
CityKuala Lumpur
Period15/08/1817/08/18

Keywords

  • Accelerometer
  • CMOS-MEMS
  • Impedance Matching
  • Inductive
  • Transformer couple
  • Transmitter

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