Integration design of wide-dynamic-range MEMS magnetometer and oscillator

Chao Hung Song, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents a Lorentz current-based MEMS magnetometer integrated with MEMS oscillator. The auto capacitance offset calibration magnetometer can achieve a tunable sensitivity from 12 to 2.94×106 T/V and eliminate the capacitance mismatch caused by process variation under 0.084fF by SAR calibrator. The natural frequency of proposed differential oscillator is around 18.8 kHz, Q-factor of 183 under the bias voltage 20 V and at 760Torr ambient pressure. The proposed biasing method of oscillator obtains a frequency tuning range of 58510 ppm, resulting in a wide-dynamic-range which is about 107.8dB. FOM of the oscillator design is 4.75×1020 Hz2Ω2. The integrated magnetometer and oscillator is implemented in 1P6M ASIC compatible CMOS MEMS process.

Original languageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages17-20
Number of pages4
ISBN (Electronic)9781538652831
DOIs
StatePublished - 3 Oct 2018
Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
Duration: 15 Aug 201817 Aug 2018

Publication series

NameIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Volume2018-August

Conference

Conference13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
CountryMalaysia
CityKuala Lumpur
Period15/08/1817/08/18

Keywords

  • differential oscillator
  • magnetometer
  • MEMS
  • wide-dynamic-range

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