Integrated CMOS MEMS liquid capacitive inclinometer

Yi Chiu, Bo Ting Chen, Hao-Chiao Hong

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper reports a miniaturized CMOS MEMS capacitive inclinometer with dielectric liquid sensing medium in the reservoir on top of the CMOS substrate. A DFR/glass cap is bonded to the CMOS chip to form a reservoir for the sensing liquid. Rotating/tilting the sensor changes the electrode area covered by the liquid and leads to a change of capacitance. The packaged sensor had a dimension of 2.4×2.4×1.2 mm 3 . Experimental results obtained by the on-chip readout circuit showed the proposed inclinometer had a sensitivity of 0.48 mV/deg in the linear range between ±60°. With proper calibration, the linear range can be extended to ±90°.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1152-1155
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • CMOS MEMS
  • dry-film resist (DFR)
  • inclinometer
  • liquid
  • packaging
  • SU-8

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