Integrated antennas on Si, proton-implanted Si and Si-on-quartz

K. T. Chan, Albert Chin, Y. B. Chen, Ying-Dar Lin, T. S. Duh, W. J. Lin

Research output: Contribution to journalArticlepeer-review

69 Scopus citations


High performance antenna has been realized on proton-implanted Si with 106 Ω-cm resistivity. Sharp antenna resonance and low loss up to 20GHz are observed indicating the excellent antenna quality. In contrast, very poor antenna characteristics are found on conventional oxide-isolated Si because of the lossy substrate.

Original languageEnglish
Pages (from-to)903-906
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 1 Jan 2001

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