Inhibition of bird's beak in LOCOS by new buffer N2O oxide

Tien-Sheng Chao, J. Y. Cheng, T. F. Lei

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

Original languageEnglish
Pages (from-to)323-324
Number of pages2
JournalElectronics Letters
Volume31
Issue number4
DOIs
StatePublished - 16 Feb 1995

Keywords

  • Oxidation
  • Silicon

Fingerprint Dive into the research topics of 'Inhibition of bird's beak in LOCOS by new buffer N<sub>2</sub>O oxide'. Together they form a unique fingerprint.

Cite this