Influence of surface state on biochemical sensing using sige nanowire

Chiung Hui Lai, Kow-Ming Chang, Yi Ming Chen, Chu Feng Chen*, Po Shen Kuo, Tai Yuan Chang, Allen Jong Woei Whang, Yi Lung Lai, Shiu Yu Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Nanowires are extensively used to fabricate highly sensitive electrical sensors for detection of biological and chemical species. The hole mobility can be promoted by the increasing Ge fraction in SiGe, achieved by the oxidation-induced Ge condensation. However, oxidation increases the number of surface states, which brings the nonnegligible contribution in mobility degradation. In this work, 3-aminopropyltrimethoxysilane (APTMS) was used as a biochemical reagent to modify the surface of SiGe nanowires, then bonding to bio-linker, bis (3-sulfo-N-hydroxysuccinimide ester) sodium salt (BS3). Various methods have been proposed for increasing sensitivity of boron-doped SiGe nanowires, such as capping layer, surface treatment, and annealing temperature.

Original languageEnglish
Article number7052347
Pages (from-to)334-338
Number of pages5
JournalIEEE Transactions on Nanobioscience
Volume14
Issue number4
DOIs
StatePublished - 1 Jun 2015

Keywords

  • Biosensors
  • oxidation
  • sensitivity
  • SiGe nanowire
  • surface state
  • surface treatment

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