Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films

C. Y. Yen, S. R. Jian*, G. J. Chen, C. M. Lin, H. Y. Lee, W. C. Ke, Y. Y. Liao, P. F. Yang, C. T. Wang, Y. S. Lai, Jason S.C. Jang, Jenh-Yih Juang

*Corresponding author for this work

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