Inductive CMOS MEMS accelerometer with integrated variable inductors

Yi Chiu; Hao-Chiao Hong; Chia Wei Lin

doi:10.1109/MEMSYS.2016.7421795

Inductive CMOS MEMS accelerometer with integrated variable inductors

Yi Chiu^*, Hao-Chiao Hong, Chia Wei Lin

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	974-977
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421795
State	Published - 26 Feb 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country	China
City	Shanghai
Period	24/01/16 → 28/01/16

Access to Document

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Chiu, Y., Hong, H-C., & Lin, C. W. (2016). Inductive CMOS MEMS accelerometer with integrated variable inductors. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 974-977). [7421795] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421795

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title = "Inductive CMOS MEMS accelerometer with integrated variable inductors",

abstract = "This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.",

author = "Yi Chiu and Hao-Chiao Hong and Lin, {Chia Wei}",

year = "2016",

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day = "26",

doi = "10.1109/MEMSYS.2016.7421795",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",

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note = "null ; Conference date: 24-01-2016 Through 28-01-2016",

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Chiu, Y , Hong, H-C & Lin, CW 2016, Inductive CMOS MEMS accelerometer with integrated variable inductors. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421795, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 974-977, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421795

Inductive CMOS MEMS accelerometer with integrated variable inductors. / Chiu, Yi ; Hong, Hao-Chiao; Lin, Chia Wei.

MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 974-977 7421795 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.

AB - This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.

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Chiu Y , Hong H-C, Lin CW. Inductive CMOS MEMS accelerometer with integrated variable inductors. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 974-977. 7421795. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2016.7421795