Inductive CMOS MEMS accelerometer with integrated variable inductors

Yi Chiu*, Hao-Chiao Hong, Chia Wei Lin

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages974-977
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - 26 Feb 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period24/01/1628/01/16

Fingerprint Dive into the research topics of 'Inductive CMOS MEMS accelerometer with integrated variable inductors'. Together they form a unique fingerprint.

Cite this