Indentation-induced mechanical deformation behaviors of AlN thin films deposited on c -plane sapphire

Sheng Rui Jian*, Jenh-Yih Juang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Fingerprint Dive into the research topics of 'Indentation-induced mechanical deformation behaviors of AlN thin films deposited on c -plane sapphire'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds