in-situ fabrication of tl-based superconducting thin films by two-zone rf-sputtering

S. J. Wang*, Jenh-Yih Juang, L. C. Shih, C. S. Nee, Kaung-Hsiung Wu, T. M. Uen, Y. S. Gou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Attempts to fabricate Tl-based super-conducting thin films in-situ were made using a two-zone off-axis rf-sputtering method. The effects of Tl2O partial pressure on the phase formation and growth of various Tl-based superconducting phases were first investigated by an ex-situ two zone postannealing scheme to simulate the depsoition environment of subsequent in-situ process. The conditions obtained were then used as guidelines for in-situ processes. The rf-sputtering system used for in-situ deposition is equipped with heating facilities capable of controlling the temperatures of the substrates and the Tl2O3 source separately. Preliminary results indicate that, by varying the substrate temperature and the partial pressure of Tl2O in a similar manner, Tl-based superconducting phases can be obtained in-situ with properties comparable to those obtained by two-step annealing processes.

Original languageEnglish
Article number620954
Pages (from-to)1891-1894
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Issue number2 PART 2
StatePublished - Jun 1997

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