Improvement on performance and reliability of TaN/HfO2 LTPS-TFTs with fluorine implantation

Ming Wen Ma, Chih Yang Chen, Chun Jung Su, Woei Cherng Wu, Tsung Yu Yang, Kuo Hsing Kao, Tien-Sheng Chao*, Tan Fu Lei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint Dive into the research topics of 'Improvement on performance and reliability of TaN/HfO<sub>2</sub> LTPS-TFTs with fluorine implantation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy