Improvement of indium-tin oxide films on polyethylene terephthalate substrates using hot-wire surface treatment

Dong Sing Wuu*, Shui Yang Lien, Hsin Yuan Mao, Jui Hao Wang, Bing Rui Wu, Pin Chuan Yao, In Cha Hsieh, Hsin Han Peng, Ray-Hua Horng, Yuan Chou Chuang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations

Abstract

Indium-tin oxide (ITO) thin films have been studied extensively in flat panel displays because they combine unique transparent and conducting properties. A continuous roll-to-roll sputter system was used to deposit ITO/SiO2 thin films on polyethylene terephthalate (PET) substrates with no intentional heating. Typical transmittance and resistivity of the ITO/SiO2/PET sample were 78% (400∼700 nm) and 7.5 × 10 - 3 Ω cm, respectively. Changes in the characteristics of ITO/SiO2/PET after hot-wire surface treatment in oxygen were examined in terms of resistivity, transmittance, surface roughness and bond configuration. The effects of process parameters like iridium wire temperature, chamber pressure and process duration on the properties of the ITO films are studied in details and compared with the works by plasma or furnace annealing. Under optimum conditions, the resistivity of the ITO/SiO 2/PET sample can achieve a minimum value of 1 × 10- 3 Ω cm with a transmittance of 82%. These results indicate that the hot-wire system can be utilized to realize better quality film and to overcome the technological limits imposed by the role-to-role sputtering conditions.

Original languageEnglish
Pages (from-to)346-349
Number of pages4
JournalThin Solid Films
Volume501
Issue number1-2
DOIs
StatePublished - 20 Apr 2006
EventProceedings of the Third International Conference on Hot-Wire -
Duration: 23 Aug 200427 Aug 2004

Keywords

  • Hot-wire
  • Indium-tin oxide
  • Resistivity
  • Surface modification

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