Improvement of hydrogenated amorphous-silicon TFT performances with low-κ siloxane-based hydrogen silsesquioxane (HSQ) passivation layer

Ta Shan Chang, Ting Chang Chang, Po-Tsun Liu, Tien Shan Chang, Chun Hao Tu, Feng Sheng Yeh

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

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Chemical Compounds

Engineering & Materials Science