Improved immunity to plasma damage in ultrathin nitrided oxides

Chi Chun Chen, Horng-Chih Lin, Chun Yen Chang, Mong Song Liang, Chao-Hsin Chien, Szu Kang Hsien, Tiao Yuan Huang

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Plasma-induced damage in various 3-nm thick gate oxides (i.e., pure O2 and N2O-nitrided oxides) was investigated by subjecting both nMOS and pMOS antenna devices to a photoresist ashing step after metal pad definition. Gate leakage current measurements indicated that large leakage current occurs at the wafer center as well as at the wafer edge for pMOS devices, while it occurs only at the wafer center for nMOS devices. These interesting observations could be explained by the polarity dependence of ultrathin oxides in charge-to-breakdown measurements. Additionally, ultrathin N2O-nitrided oxides show superior immunity to charging damage, especially for pMOS devices.

Original languageEnglish
Pages (from-to)15-17
Number of pages3
JournalIEEE Electron Device Letters
Volume21
Issue number1
DOIs
StatePublished - 1 Jan 2000

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