Improved design of piezoelectric micro-actuators for HDD

Gih Keong Lau*, Hejun Du

*Corresponding author for this work

Research output: Contribution to journalConference article

2 Scopus citations


This paper presents a design of piezoelectric micro-actuator with improved stroke sensitivity and adequate level of lateral resonant frequency for hard disk drive (HDD) application. The improved design employed active piezoelectric elements in push-pull configuration, and two flexural serpentines with inverse-T slits in between them. Instead of adopting conventional design of physical hinge, the two flexural serpentines allow flexural rotations of load beam about an artificial hinge at larger magnification factors. The present design also allows easy adjustment between stroke sensitivity and lateral resonant frequency, which are conflicting with each other, through placement of piezoelectric elements.

Original languageEnglish
Pages (from-to)113-119
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1 Dec 2002
EventSmart Structures, Devices, and Systems - Melbourne, VIC., Australia
Duration: 16 Dec 200218 Dec 2002


  • Design optimization
  • Dual-stage actuators
  • Hard disk drives
  • Piezoelectric micro-actuators

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