Implementation of surface acoustic wave vapor sensor using complementary metal-oxide-semiconductor amplifiers

Chia Sung Chiu*, Ching Chun Chang, Chia Lin Ku, Kang Ming Peng, Erik S. Jeng, Wen Lin Chen, Guo Wei Huang, Lin-Kun Wu

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

A surface acoustic wave (SAW) vapor sensor is presented in this work. A SAW delay line oscillator on quartz substrate with the high gain complementary metal-oxide-semiconductor (CMOS) amplifier using a two-poly-two-metal (2P2M) 0.35 μm process was designed. The gain of the CMOS amplifier and its total power consumption are 20 dB and 70mW, respectively. The achieved phase noise of this SAW oscillator is -150 dBc/Hz at 100 kHz offset. The sensing is successfully demonstrated by a thin poly(epichlorohydrin) (PECH) polymer film on a SAW oscillator with alcohol vapor. This two-in-one sensor unit includes the SAW device and the CMOS amplifier provides designers with comprehensive model for using these components for sensor circuit fabrication. Furthermore it will be promising for future chemical and biological sensing applications.

Original languageEnglish
Article number04C182
JournalJapanese Journal of Applied Physics
Volume48
Issue number4 PART 2
DOIs
StatePublished - 1 Apr 2009

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