Impacts of a buffer layer and Hi-wafers on the performance of strained-channel NMOSFETs with SiN capping layer

Tzu I. Tsai*, Yao Jen Lee, King Sheng Chen, Jeff Wang, Chia Chen Wan, Fu Kuo Hsueh, Horng-Chih Lin, Tien-Sheng Chao, Tiao Yuan Huang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publication2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
StatePublished - 1 Dec 2007
Event2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
Duration: 12 Dec 200714 Dec 2007

Publication series

Name2007 International Semiconductor Device Research Symposium, ISDRS

Conference

Conference2007 International Semiconductor Device Research Symposium, ISDRS
CountryUnited States
CityCollege Park, MD
Period12/12/0714/12/07

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