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Impact of Zirconium Doping on Steep Subthreshold Switching of Negative Capacitance Hafnium Oxide Based Transistors
Chun-Hu Cheng, Ming Huei Lin, Hsin Yu Chen, Chia Chi Fan, Chien Liu, Hsiao-Hsuan Hsu, Chun-Yen Chang
Research output: Contribution to journal › Article › peer-review