Immersive technology for human-centric cyberphysical systems includes broad concepts that enable users in the physical world to connect with the cyberworld with a sense of immersion. Complex systems such as virtual reality, augmented reality, brain-computer interfaces, and brain-machine interfaces are emerging as immersive technologies that have the potential for improving manufacturing systems. Industry 4.0 includes all technologies, standards, and frameworks for the fourth industrial revolution to facilitate intelligent manufacturing. Industrial immersive technologies will be used for smart manufacturing innovation in the context of Industry 4.0's human machine interfaces. This research provides a thorough review of the literature, construction of a domain ontology, presentation of patent metatrend statistical analysis, and data mining analysis using a technology function matrix and highlights technical and functional development trends using latent Dirichlet allocation (LDA) models. A total of 179 references from the IEEE and IET databases and 2,672 patents are systematically analyzed to identify current trends. The paper establishes an essential foundation for the development of advanced human-centric cyberphysical systems in complex manufacturing processes.