Hot-wire chemical vapor deposition and characterization of p-type nanocrystalline SiC films and their use in Si heterojunction solar cells

Hsin Yuan Mao, Dong Sing Wuu*, Bing Rui Wu, Shih Yung Lo, Hsin Yu Hsieh, Ray-Hua Horng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

Wide optical bandgap p-type nanocrystalline silicon carbide (p-nc-SiC) films deposited by hot-wire chemical vapor deposition were used as window layers in n-type crystalline Si heterojunction (HJ) solar cells. The effect of H 2 flow rates on the material properties of p-nc-SiC films was investigated by X-ray diffractometer and Raman spectroscopy. Moreover, the optical and electrical properties, such as optical bandgap (E g), dark conductivity, and activation energy (E a), of p-nc-SiC films were also measured. It was found that H 2 flow rates played an important role in forming of p-nc-SiC films and increasing the E g and decreasing the E a of p-nc-SiC films. Moreover, the effect of hydrogenation process of the amorphous Si buffer layer on solar cell characteristics was investigated. After the deposition and hydrogenation parameters were optimized, the Si HJ solar cells with the open-circuit voltage of 0.59 V, short-circuit current density of 38.06 mA/cm 2, fill factor of 62.03%, and the conversion efficiency of 14.09% could be obtained.

Original languageEnglish
Pages (from-to)2110-2114
Number of pages5
JournalThin Solid Films
Volume520
Issue number6
DOIs
StatePublished - 1 Jan 2012

Keywords

  • Heterojunction
  • Hydrogenation
  • Nanocrystalline
  • Silicon carbide
  • Solar cell

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