A series of parallel v-groove microstructures was embossed on glass at an elevated temperature. The effects of glass temperature, applied pressure, holding time, and demold temperature on the conformity between the product and the tool were studied. We found that very precise microstructures can be fabricated on glass at temperatures about 35 degrees-55 degrees C above the glass transition temperatures. However, careful attention should be paid to the demold temperature and the mold release agent in order to prevent the tool from sticking to the glass.
- FOCUSED ION-BEAM; CARBON MOLD; MICRO