Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature

Pragya Singh, Li Lun Hu, Hsiao-Wen Zan*, Tseung-Yuen Tseng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.

Original languageEnglish
Article number095501
JournalNanotechnology
Volume30
Issue number9
DOIs
StatePublished - 4 Jan 2019

Keywords

  • gas sensor
  • metal oxide semiconductor
  • nanorods thin film
  • nitric oxide
  • vertical channel
  • ZnO

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